3D Laser Scanning Confocal Microscope

VK-X series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Measurement head: Red semiconductor laser VK-X1050

VK-X1050 - Measurement head: Red semiconductor laser

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Data Sheet (PDF)

Specifications

Model			VK-X1050
Type			measurement head
Total magnification			Up to 28,800 x^*1
Field of view (minimum range)			11 to 7,398 µm
Frame rate (laser measurement speed)			4 to 125 Hz, 7,900 Hz^*2
Measurement principle	Optical system		Pinhole confocal optical system, Focus variation
	Light-receiving element		16-bit sensing: photomultiplier, High-definition colour CMOS
	Scanning method (during general measurement and image stitching)		Automatic upper/lower limit setting, rapid laser light intensity setting (AAGII) , automatic detection and rescanning in case of poor reflection (double scan)
Height measurement	Display resolution		5 nm
	Linear scale
	Dynamic range		16 bits
	Repeatability σ	Laser confocal	20 x, 40 nm; 50 x, 20 nm
		Focus variation	5 x, 500 nm; 10 x, 100 nm; 20 x, 50 nm; 50 x, 30 nm
	Height data acquisition range		0.7 million steps
	Accuracy		0.2 + L /100 µm or better^*3
Width measurement	Display resolution		10 nm
	Repeatability 3σ	Laser confocal	20 x, 100 nm; 50 x, 50 nm
		Focus variation	5 x, 400 nm; 10 x, 400 nm; 20 x, 120 nm; 50 x, 65 nm
	Accuracy		±2 %^*3
XY stage configuration	Manual: Moving range		70 mm x 70 mm
	Motorised: Moving range		100 mm x 100 mm
Observation	Image options		High-definition colour CMOS image 16-bit laser colour confocal image Confocal optical system with ND filter C-laser DIC image (differential interference image)
	Illumination		Ring illumination, coaxial illumination
Laser light source for measurements	Wavelength		Red semiconductor laser, 661 nm
	Maximum output power		1 mW
	Laser class		Class 2 laser product (IEC60825-1)
Power supply	Power voltage		100 to 240 VAC, 50/60 Hz
	Current consumption		150 VA
Weight			Approx. 13.0 kg
^1 23 inch full-screen display. ^2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm. ^*3 When measuring a standard sample (standard scale) with a 20 x objective lens (or higher).

Data Sheet (PDF) Other Models