Image Dimension Measurement System
IM-6000 series
Recommended Replaceable Products: 300 × 200 mm square stage Wide stage model incorporating programmable ring-illumination/light probe unit/Contact Height Measurement Unit - IM-8030T
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Heads with the contact height measurement unit IM-6225T
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | IM-6225T | |||
Type | Head | |||
Image sensor | 1" 6.6 mega pixel monochrome CMOS | |||
Display | 10. 4" LCD monitor (XGA: 1024 × 768) | |||
Receiver lens | Double telecentric lens | |||
Image measurement | Field of view | Wide field: ø100 × L200 mm, High precision: 25 × L125 mm | ||
Minimum display unit | 0.1 µm | |||
Repeatability | W/o stage movement | Wide field: ±1 µm, High precision: ±0. 5 µm | ||
With stage movement | Wide field: ±2 µm, High precision: ±1. 5 µm | |||
Measurement accuracy (±2σ) | W/o binding | Wide field: ±5 µm*1, High precision: ±2 µm*2 | ||
With binding | Wide field: ±(7 + 0. 02 L) µm*3, High precision: ±(4 + 0. 02 L) µm*4 | |||
Height measurement | Measuring range | 0 to 60 mm | ||
Measurement force | 0.3 N | |||
Measurement position accuracy (XY) | ±0.7 mm | |||
Minimum display unit | 1 µm | |||
Measurable area (XY) | Standard probe | Wide field: 45 × 95 mm, High precision: 7.5 × 25 mm | ||
Wide-range probe | Wide field: 95 × 95 mm, High precision: 60 × 25 mm | |||
Repetition accuracy | Standard probe | ±2 µm*5 | ||
Wide-range probe | ±5 µm*5 | |||
Measurement accuracy | Standard probe | ±7.5 µm*6 | ||
Wide-range probe | ±15 µm*6 | |||
External remote input | Non-voltage input (with and without contact) | |||
External output | OK/NG/FAIL/MEAS. | Relay output/rated load: 24 VDC, 0. 5 A/ON resistance | ||
Interface | LAN | RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) | ||
USB 2.0 series A | 6 ports (front: 2, rear: 4) | |||
Record | Hard disk drive | 250 GB | ||
Illumination system | Transparent | Telecentric transparent illumination | ||
Ring | Four division, multi-angle illumination (electric) | |||
X stage | Moving range | 100 mm (electric) | ||
Z stage | 30 mm (electric) | |||
Withstand load | 2 kg | |||
Power supply | Power voltage | 100 to 240 VAC 50/60 Hz | ||
Power consumption | 310 VA max. | |||
Environmental resistance | Ambient temperature | +10 to +35 °C | ||
Relative humidity | 20 to 80 % RH (No condensation) | |||
Weight | Approx. 34 kg | |||
*1 In the range of ø80 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position |